PMMA resist templates for dielectric and metallic "Yablonovite" photonic crystals at submicrometer scales

C. Cuisin1,2, * A. Chelnokov1*, D. Decanini2, Y. Chen2 , J.M. Lourtioz1

1) Institut d'Electronique Fondamentale, CNRS UMR 8622, Bât. 220, Univ. Paris Sud, 91405 Orsay, France

2) Laboratoire de Microstructures et de Microélectronique, CNRS, 196 Avenue Henri Ravera, 92225 Bagneux, France

atch@ief.u-psud.fr, cuisin@ief.u-psud.fr

We present the fabrication, numerical simulation and optical characterisation of micro- and sub-micrometer "Yablonovite" structures. The structures are fabricated in PMMA resist by three consecutive exposures through a triangular lattice of holes. The sample is tilted by 35.26° with respect to the incoming X-ray synchrotron beam and rotated by 120° between each exposure. Submicrometer structures showing up to six (111) periods are fabricated with a good reproducibility and a large process latitude in 6.2 mm PMMA thick resist. In the quest of a complete photonic band gap, we also present two simple and low-cost ways to replicate the 3D sub-micrometer structure in a high refractive index material. Results of copper electrodeposition and titanium oxide deposition in the resist template will be discussed.